| ID | 199240075 |
|---|---|
| Description | 2Chamber (Gas SiH4, N20, PH3/Ar, B2H6, O2, CF4, GaH4) |
| Manufacturer | AMAT |
| Model | P5000 |
| Vintage | 1995.08.13 |
| Serial No. | 4267 |
| Quantity | 1 |
| Condition | As-is |
| Equipment Detail |
PECVD |
Main text
Attachments
- AMAT P5000 PECVD - Spare Parts.pdf (1.8M) 14downloads | DATE : 2024-12-03 10:17:02
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