| ID | 199220336 |
|---|---|
| Description | Wafer lotation ±3°, Wafer size 233mm(Max) |
| Manufacturer | ASM |
| Model | MS90 |
| Vintage | 2018.11.07 |
| Serial No. | MS90-04001-0021 |
| Quantity | 1 |
| Condition | Working |
| Equipment Detail |
Map Sort System |
Main text
Attachments
- MS90_Cadalog.pdf (8.5M) 27downloads | DATE : 2025-04-29 15:20:11
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