ID | 199220336 |
---|---|
Description | Wafer lotation ±3°, Wafer size 233mm(Max) |
Manufacturer | ASM |
Model | MS90 |
Vintage | 2018.11.07 |
Serial No. | MS90-04001-0021 |
Quantity | 1 |
Condition | Working |
Equipment Detail |
Map Sort System |
Main text
Attachments
- MS90_Cadalog.pdf (8.5M) 10downloads | DATE : 2025-04-29 15:20:11