| ID | 199240076 |
|---|---|
| Description | 3Chamber (Gas O2, CF4, SiH4, GeH4, N20, N2) |
| Manufacturer | AMAT |
| Model | P5000 |
| Vintage | 1997.06.22 |
| Serial No. | 4420 |
| Quantity | 1 |
| Condition | As-is |
| Equipment Detail |
PECVD (3Chamber) |
Main text
Attachments
- AMAT P5000 PECVD - Spare Parts.pdf (1.8M) 21downloads | DATE : 2024-12-03 10:26:08
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