| ID | 131200002 |
|---|---|
| Description | Single plasma source (RF bias), High reliability & low CoO, Tray wafer chips available |
| Manufacturer | PSK |
| Model | ECOLITE II T |
| Vintage | Unknown |
| Serial No. | PEK13007 |
| Quantity | 1 |
| Condition | As-is |
| Equipment Detail |
Asher/Descum (single chamber) |
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