- ID: 199220362

- EQUIPMENT: Horizontal Furnaces (LPCVD)

- DESCRIPTION: Wafer 4, 6, 8 Inch

- MAKER: Centrotherm

- MODEL: E1550

- VINTAGE: Unknown

- CONDITION: As-is

- QUANTITY: 1

1. Spec & Performance

□ Wafer size : 4inch, 6inch, 8inch, 125Sq, 156Sq

□ Capability : 70 wafers/batch

□ Process : Wet/Dry Oxidation, Poly Si, (Low Stress), SiNx, (B)PSG process

□ Uniformity : ±0.5~1%(Oxidation), ±1~2%(Poly Si, SiNx), ±3~5%(BPSG)

2. Applications

□ Passivation

□ ARC coating

□ Gate formation

□ MEMS/NEMS sensing materia