KLA, PHXDF5.0, Wafersight3
| ID | 199220219 |
|---|---|
| Description | wafer geometry measurement system, up to 450mm wafer |
| Manufacturer | KLA |
| Model | PHX DF 5.0 |
| Vintage | 2013.07.02 |
| Serial No. | 48130711333 |
| Quantity | 1 |
| Condition | As-is |
| Equipment Detail |
Wafersight3 |
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- ID: 199220219
- EQUIPMENT: Wafersight3
- DESCRIPTION: wafer geometry measurement system, up to 450mm wafer
- MODEL: PHX DF 5.0
- MAKER: KLA
- VINTAGE: 2013.07.02
- CONDITION: As-is
- QUANTITY: 1
- 이전글 Obducat, NIL-60-SS, Imprinter 24.08.01
- 다음글 Optima, RXT-1200, Wafersight 23.09.27
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