Plasma Therm, VERSALINE, ICP-RIE Etcher
| ID | 199240166 |
|---|---|
| Description | Wafer 200mm (Max) |
| Manufacturer | Plasma Therm |
| Model | VERSALINE |
| Vintage | 2012.09.28 |
| Serial No. | N/A |
| Quantity | 1 |
| Condition | Working/Deinstall, As-is |
| Equipment Detail |
ICP-RIE Etcher |
Product Details
Main text
- ID: 199240166
- EQUIPMENT: ICP-RIE Etcher
- DESCRIPTION: Wafer 200mm (Max)
- MAKER: Plasma Therm
- MODEL: VERSALINE
- VINTAGE: 2012.09.28
- CONDITION: Working/Deinstall, As-is
- QUANTITY: 1
- Prev Midas System, MDA-60MS, Mask Aligner 25.02.03
- Next KLA, AFS-3220, Flatness Measuring 23.09.15
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