SemiStory Equipment List (23.03.28)
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SemiStory Equipment List _ 23.03.28 | |||||||
NO | Asset NO | EQUIPMENT | MODEL | MAKER | Q'ty | Remark | |
1 | 161150001 | Plasma Cleaner | JSPES-W21 | JESAGI | 1 | ||
2 | 161190002 | Plasma Cleaner | JSPCS-750 | JESAGI | 1 | Photo | |
3 | 199190001 | MOCVD | AIX200/4RFS(2"x3) | AIXTRON | 1 | Photo | |
4 | 121210001 | Gas Analyzer | HALO+ | Tera Tech | 1 | ||
5 | 121210005 | Clean Air (Moving Scrubber) | New Tech Wave | NTW-MSE2000S(B) | 1 | ||
6 | 151180002 | PECVD | PECVD System |
| 1 | ||
7 | 199200002 | PECVD | NGP-1000 | Oxford | 1 | ||
8 | 111190001 | Sputter | ENTRON | ULVAC | 1 | ||
9 | 121210006 | Ion Sputter&Coater | 108Auto | Cressington | 1 | ||
10 | 121210007 | E-beam | Resolution | Cha Industries | 1 | ||
11 | 199190005 | RTA | RTA150H-AVP1 | NewYoung Mtech | 1 | ||
12 | 121210067 | RTP | YIT-6032 | YEST | 1 | ||
13 | 121180110 | ICP Etcher | TENACIER-400VE | SUNIC | 1 | ||
14 | 199180022 | ICP Etcher | 300L | Maxis | 1 | ||
15 | 121210068 | ICP Etcher | TE3100 | Tainics | 1 | ||
16 | 199180018 | ICP Etcher | TE3100 | Tainics | 1 | ||
17 | 121210069 | ICP Etcher | Plasmalab100-ICP380 | Oxford | 1 | ||
18 | 121210070 | ICP Etcher | LX-380 | Top Eng | 1 | ||
19 | 124180001 | XeF2 Etcher | Genius 1125 | Boundless system | 1 | ||
20 | 199180028 | Track | MEG8-CD | GMT | 1 | ||
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